Nanostructured fibers of A-SI₃N₄ deposited by HYSY-CVD

Keyphrases

• Silicon Nitride 100%
• Hybrid System 100%
• Chemical Vapor Deposition 100%
• Microstructure Fiber 100%
• Vibrational Modes 50%
• Good Quality 50%
• Atmospheric Pressure 50%
• Chemical Vapor Deposition Method 50%
• Silicon Wafer 50%
• Low-cost Manufacturing 50%
• Alpha Type 50%
• Si3N4 Fiber 50%

Engineering

• Chemical Vapor Deposition 100%
• Vapor Deposition 100%
• Nitride 50%
• Vapor Deposition Method 50%
• Silicon Wafer 50%
• Manufacturing Cost 50%
• Atmospheric Pressure 50%

Material Science

• Silicon Nitride 100%
• Chemical Vapor Deposition 100%
• Silicon Wafer 33%