Diamond thin films were deposited onto Si (100) substrates using liquid a solution of water and acetone, ethanol, methanol and commercial Tequila as precursors by the Pulsed Liquid Injection Chemical Vapor Deposition (PLICVD) technique. Temperature was varied from 550°C to 850°C. In this work we attempted to find a crystal diameter dependence on temperature and pressure from the experimental data. The goal in this work is to found a function that can be adjusted to the experimental data. © Materials Research Society.
|Original language||American English|
|Number of pages||8|
|State||Published - 1 Dec 2010|
|Event||Materials Research Society Symposium Proceedings - |
Duration: 1 Dec 2010 → …
|Conference||Materials Research Society Symposium Proceedings|
|Period||1/12/10 → …|