TY - GEN
T1 - Nucleation and growth of diamond thin films
T2 - The role of temperature and pressure
AU - Morales, J.
AU - Bernal, R.
AU - Cruz-Vazquez, C.
AU - Salcido-Romero, E. G.
AU - Castaño, V. M.
PY - 2010
Y1 - 2010
N2 - Diamond thin films were deposited onto Si (100) substrates using liquid a solution of water and acetone, ethanol, methanol and commercial Tequila as precursors by the Pulsed Liquid Injection Chemical Vapor Deposition (PLICVD) technique. Temperature was varied from 550°C to 850°C. In this work we attempted to find a crystal diameter dependence on temperature and pressure from the experimental data. The goal in this work is to found a function that can be adjusted to the experimental data.
AB - Diamond thin films were deposited onto Si (100) substrates using liquid a solution of water and acetone, ethanol, methanol and commercial Tequila as precursors by the Pulsed Liquid Injection Chemical Vapor Deposition (PLICVD) technique. Temperature was varied from 550°C to 850°C. In this work we attempted to find a crystal diameter dependence on temperature and pressure from the experimental data. The goal in this work is to found a function that can be adjusted to the experimental data.
UR - http://www.scopus.com/inward/record.url?scp=79251619757&partnerID=8YFLogxK
U2 - 10.1557/proc-1278-s08-72
DO - 10.1557/proc-1278-s08-72
M3 - Contribución a la conferencia
AN - SCOPUS:79251619757
SN - 9781617820960
T3 - Materials Research Society Symposium Proceedings
SP - 32
EP - 39
BT - Composite, Hybrid Materials and Ecomaterials
PB - Materials Research Society
ER -