Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

E. Fuentes-Fernandez, L. Baldenegro-Perez, M. Quevedo-Lopez, Bruce Gnade, A. Hande, P. Shah, H. N. Alshareef

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@article{b084b0398c8e4398911293664d3509ca,

title = "Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers",

author = "E. Fuentes-Fernandez and L. Baldenegro-Perez and M. Quevedo-Lopez and Bruce Gnade and A. Hande and P. Shah and Alshareef, {H. N.}",

year = "2011",

month = sep,

day = "1",

doi = "10.1016/j.sse.2011.05.027",

language = "American English",

pages = "89--93",

journal = "Solid-State Electronics",

issn = "0038-1101",

publisher = "Elsevier Ltd",

}

TY - JOUR

T1 - Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

AU - Fuentes-Fernandez, E.

AU - Baldenegro-Perez, L.

AU - Quevedo-Lopez, M.

AU - Gnade, Bruce

AU - Hande, A.

AU - Shah, P.

AU - Alshareef, H. N.

PY - 2011/9/1

Y1 - 2011/9/1

U2 - 10.1016/j.sse.2011.05.027

DO - 10.1016/j.sse.2011.05.027

M3 - Article

SP - 89

EP - 93

JO - Solid-State Electronics

JF - Solid-State Electronics

SN - 0038-1101

ER -