Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

E. Fuentes-Fernandez, L. Baldenegro-Perez, M. Quevedo-Lopez, Bruce Gnade, A. Hande, P. Shah, H. N. Alshareef

Research output: Contribution to journalArticle

7 Scopus citations
Original languageAmerican English
Pages (from-to)89-93
Number of pages5
JournalSolid-State Electronics
DOIs
StatePublished - 1 Sep 2011
Externally publishedYes

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