Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

E. Fuentes-Fernandez, L. Baldenegro-Perez, M. Quevedo-Lopez, Bruce Gnade, A. Hande, P. Shah, H. N. Alshareef*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Lead zirconate titanate, Pb(Zr0.53,Ti0.47)O 3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol-gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal-ferroelectric-metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g.

Original languageEnglish
Pages (from-to)89-93
Number of pages5
JournalSolid-State Electronics
Volume63
Issue number1
DOIs
StatePublished - Sep 2011
Externally publishedYes

Bibliographical note

Funding Information:
The authors would like to thank to NSF phase I SBIR and the Texas Emerging Technology Found for partial financial support and the Army Research Laboratories for their assistance in dry etch process.

Keywords

  • Cantilever
  • Integration
  • MEMS
  • PZT
  • Perovskite
  • Piezoelectric material

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