Engineering
Buffer Layer
100%
Electrode Structure
100%
Energy Harvesting
100%
Film Property
100%
Lead Content
100%
Lead Zirconate
100%
Process Condition
100%
Ramp Rate
100%
Si Substrate
100%
Silicon Dioxide
100%
Thin Films
100%
Titanate
100%
Keyphrases
Buffer Layer
33%
Cantilever
100%
Electrical Properties
33%
Energy Harvesting System
33%
Film Crystallization
33%
Film Properties
33%
In Films
33%
Interdigital Electrodes
33%
Large Grain
33%
Lead Content
33%
Lead Zirconate Titanate
33%
Metal-ferroelectric-metal
33%
Micro Power Generation
100%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
33%
Process Conditions
33%
PZT Film
66%
PZT Thin Films
33%
Ramp Rate
33%
Si Substrate
33%
Silica
33%
Sol-gel
33%
Solution Rate
33%
Starting Solutions
33%
Zirconium Dioxide
66%
Material Science
Buffer Layer
14%
Ferroelectric Material
14%
Film
100%
Lead Zirconate Titanate
14%
Sol-Gel
14%
Surface (Surface Science)
14%
Thin Films
14%
Zirconia
28%