Abstract
In this work α-Si3N4 coatings grown by hybrid chemical vapor deposition system (HYSY-CVD) are presented. Two different morphologies, pores and fibers, were obtained using two different flows, 45 ml/min (flow 1) and 60 ml/min (flow 2) over a period of 120 min, of nitrogen:ammonia gas mixture (95%:5%). This coatings presents nanocrystals of 20 nm and 36 nm for 1 and 2 flows, respectively, this parameters were obtained by Debye-Scherer formulation. Band gaps of 1.95eV for flow 1 and 1.90 eV for flow 2 were derived from UV-Vis reflectance. The Photoluminescence spectra reveal emissions at 477 nm for flow 1 and 470 nm for flow 2.
Original language | English |
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Pages (from-to) | 111-117 |
Number of pages | 7 |
Journal | Digest Journal of Nanomaterials and Biostructures |
Volume | 12 |
Issue number | 1 |
State | Published - 1 Jan 2017 |
Bibliographical note
Publisher Copyright:© 2017, Johns Hopkins University Press. All rights reserved.
Keywords
- Ceramic Material
- Coatings
- HYSY-CVD
- Nanostructured Material
- α-SiN