Relationship of HfO<inf>2</inf> material properties and transistor performance

P. D. Kirsch, M. A. Quevedo, G. Pant, S. Krishnan, S. C. Song, H. J. Li, J. J. Peterson, B. H. Lee, R. W. Wallace, M. Kim, B. E. Gnade

Research output: Contribution to conferencePaper

2 Scopus citations
Original languageAmerican English
Pages113-114
Number of pages2
DOIs
StatePublished - 1 Dec 2006
EventInternational Symposium on VLSI Technology, Systems, and Applications, Proceedings -
Duration: 27 Sep 2007 → …

Conference

ConferenceInternational Symposium on VLSI Technology, Systems, and Applications, Proceedings
Period27/09/07 → …

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