Role of zinc source in chemical bath deposition of zinc sulfide thin films on Si3N4

P. A. Luque*, Claudia M. Gómez-Gutiérrez, G. Lastra, A. Carrillo-Castillo, M. A. Quevedo-López, A. Olivas

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


Zinc sulfide (ZnS) thin films have been grown by chemical bath deposition (CBD) using different zinc sources on a silicon nitride (Si3N4) substrate in an alkaline solution. The zinc precursors used were zinc acetate, zinc nitrate, and zinc sulfate. The structural and optical characteristics of the ZnS thin films obtained were analyzed. The morphology of the surface showed that the films were compact and uniform, with some pinholes in the surface depending on the zinc source. The most homogeneous and compact surfaces were those obtained using zinc nitrate as the zinc source with a root-mean-square (RMS) value of 3 nm. The transmission spectra indicated average transmittance of 80% to 85% in the spectral range from 300 nm to 800 nm, and the optical bandgap calculated for the films was around 3.71 eV to 3.74 eV.

Original languageEnglish
Pages (from-to)4317-4321
Number of pages5
JournalJournal of Electronic Materials
Issue number11
StatePublished - 1 Nov 2014

Bibliographical note

Publisher Copyright:
© 2014 The Minerals, Metals & Materials Society.


  • Chemical bath deposition
  • ZnS
  • thin films
  • zinc source


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