Role of zinc source in chemical bath deposition of zinc sulfide thin films on Si3N4

P. A. Luque; Claudia M. Gómez-Gutiérrez; G. Lastra; A. Carrillo-Castillo; M. A. Quevedo-López; A. Olivas

doi:10.1007/s11664-014-3334-8

Role of zinc source in chemical bath deposition of zinc sulfide thin films on Si₃N₄

P. A. Luque^*, Claudia M. Gómez-Gutiérrez, G. Lastra, A. Carrillo-Castillo, M. A. Quevedo-López, A. Olivas

^*Corresponding author for this work

Departamento de Investigación en Polímeros y Materiales

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Zinc sulfide (ZnS) thin films have been grown by chemical bath deposition (CBD) using different zinc sources on a silicon nitride (Si₃N₄) substrate in an alkaline solution. The zinc precursors used were zinc acetate, zinc nitrate, and zinc sulfate. The structural and optical characteristics of the ZnS thin films obtained were analyzed. The morphology of the surface showed that the films were compact and uniform, with some pinholes in the surface depending on the zinc source. The most homogeneous and compact surfaces were those obtained using zinc nitrate as the zinc source with a root-mean-square (RMS) value of 3 nm. The transmission spectra indicated average transmittance of 80% to 85% in the spectral range from 300 nm to 800 nm, and the optical bandgap calculated for the films was around 3.71 eV to 3.74 eV.

Original language	English
Pages (from-to)	4317-4321
Number of pages	5
Journal	Journal of Electronic Materials
Volume	43
Issue number	11
DOIs	https://doi.org/10.1007/s11664-014-3334-8
State	Published - 1 Nov 2014

Bibliographical note

Publisher Copyright:
© 2014 The Minerals, Metals & Materials Society.

Keywords

Chemical bath deposition
ZnS
thin films
zinc source

Access to Document

10.1007/s11664-014-3334-8

Cite this

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title = "Role of zinc source in chemical bath deposition of zinc sulfide thin films on Si3N4",

abstract = "Zinc sulfide (ZnS) thin films have been grown by chemical bath deposition (CBD) using different zinc sources on a silicon nitride (Si3N4) substrate in an alkaline solution. The zinc precursors used were zinc acetate, zinc nitrate, and zinc sulfate. The structural and optical characteristics of the ZnS thin films obtained were analyzed. The morphology of the surface showed that the films were compact and uniform, with some pinholes in the surface depending on the zinc source. The most homogeneous and compact surfaces were those obtained using zinc nitrate as the zinc source with a root-mean-square (RMS) value of 3 nm. The transmission spectra indicated average transmittance of 80% to 85% in the spectral range from 300 nm to 800 nm, and the optical bandgap calculated for the films was around 3.71 eV to 3.74 eV.",

keywords = "Chemical bath deposition, ZnS, thin films, zinc source",

author = "Luque, {P. A.} and G{\'o}mez-Guti{\'e}rrez, {Claudia M.} and G. Lastra and A. Carrillo-Castillo and Quevedo-L{\'o}pez, {M. A.} and A. Olivas",

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doi = "10.1007/s11664-014-3334-8",

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T1 - Role of zinc source in chemical bath deposition of zinc sulfide thin films on Si3N4

AU - Luque, P. A.

AU - Gómez-Gutiérrez, Claudia M.

AU - Lastra, G.

AU - Carrillo-Castillo, A.

AU - Quevedo-López, M. A.

AU - Olivas, A.

PY - 2014/11/1

Y1 - 2014/11/1

N2 - Zinc sulfide (ZnS) thin films have been grown by chemical bath deposition (CBD) using different zinc sources on a silicon nitride (Si3N4) substrate in an alkaline solution. The zinc precursors used were zinc acetate, zinc nitrate, and zinc sulfate. The structural and optical characteristics of the ZnS thin films obtained were analyzed. The morphology of the surface showed that the films were compact and uniform, with some pinholes in the surface depending on the zinc source. The most homogeneous and compact surfaces were those obtained using zinc nitrate as the zinc source with a root-mean-square (RMS) value of 3 nm. The transmission spectra indicated average transmittance of 80% to 85% in the spectral range from 300 nm to 800 nm, and the optical bandgap calculated for the films was around 3.71 eV to 3.74 eV.

AB - Zinc sulfide (ZnS) thin films have been grown by chemical bath deposition (CBD) using different zinc sources on a silicon nitride (Si3N4) substrate in an alkaline solution. The zinc precursors used were zinc acetate, zinc nitrate, and zinc sulfate. The structural and optical characteristics of the ZnS thin films obtained were analyzed. The morphology of the surface showed that the films were compact and uniform, with some pinholes in the surface depending on the zinc source. The most homogeneous and compact surfaces were those obtained using zinc nitrate as the zinc source with a root-mean-square (RMS) value of 3 nm. The transmission spectra indicated average transmittance of 80% to 85% in the spectral range from 300 nm to 800 nm, and the optical bandgap calculated for the films was around 3.71 eV to 3.74 eV.

KW - Chemical bath deposition

KW - ZnS

KW - thin films

KW - zinc source

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