Sol-gel derived low temperature HfO<inf>2</inf>-GPTMS hybrid gate dielectric for a-IGZO thin-film transistors (TFTs)

M. G.Syamala Rao, A. Sánchez-Martinez, Gerardo Gutiérrez-Heredia, Manuel A. Quevedo-López, Rafael Ramírez-Bon

Research output: Contribution to journalArticleResearchpeer-review

4 Citations (Scopus)
Original languageAmerican English
Pages (from-to)16428-16434
Number of pages7
JournalCeramics International
DOIs
StatePublished - 1 Oct 2018
Externally publishedYes

Fingerprint

Gate dielectrics
Thin film transistors
Sol-gels
Leakage currents
Capacitance
Metals
Gates (transistor)
Thin films
Temperature
Spectroscopic ellipsometry
Hybrid materials
Spin coating
Electric potential
Threshold voltage
Dielectric properties
Transparency
Sol-gel process
Capacitors
Permittivity
Current density

Cite this

Rao, M. G. S., Sánchez-Martinez, A., Gutiérrez-Heredia, G., Quevedo-López, M. A., & Ramírez-Bon, R. (2018). Sol-gel derived low temperature HfO<inf>2</inf>-GPTMS hybrid gate dielectric for a-IGZO thin-film transistors (TFTs). Ceramics International, 16428-16434. https://doi.org/10.1016/j.ceramint.2018.06.056
Rao, M. G.Syamala ; Sánchez-Martinez, A. ; Gutiérrez-Heredia, Gerardo ; Quevedo-López, Manuel A. ; Ramírez-Bon, Rafael. / Sol-gel derived low temperature HfO<inf>2</inf>-GPTMS hybrid gate dielectric for a-IGZO thin-film transistors (TFTs). In: Ceramics International. 2018 ; pp. 16428-16434.
@article{be19a675fa1a461f9eec29ce83713268,
title = "Sol-gel derived low temperature HfO2-GPTMS hybrid gate dielectric for a-IGZO thin-film transistors (TFTs)",
author = "Rao, {M. G.Syamala} and A. S{\'a}nchez-Martinez and Gerardo Guti{\'e}rrez-Heredia and Quevedo-L{\'o}pez, {Manuel A.} and Rafael Ram{\'i}rez-Bon",
year = "2018",
month = "10",
day = "1",
doi = "10.1016/j.ceramint.2018.06.056",
language = "American English",
pages = "16428--16434",
journal = "Ceramics International",
issn = "0272-8842",
publisher = "Elsevier Ltd",

}

Sol-gel derived low temperature HfO<inf>2</inf>-GPTMS hybrid gate dielectric for a-IGZO thin-film transistors (TFTs). / Rao, M. G.Syamala; Sánchez-Martinez, A.; Gutiérrez-Heredia, Gerardo; Quevedo-López, Manuel A.; Ramírez-Bon, Rafael.

In: Ceramics International, 01.10.2018, p. 16428-16434.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Sol-gel derived low temperature HfO2-GPTMS hybrid gate dielectric for a-IGZO thin-film transistors (TFTs)

AU - Rao, M. G.Syamala

AU - Sánchez-Martinez, A.

AU - Gutiérrez-Heredia, Gerardo

AU - Quevedo-López, Manuel A.

AU - Ramírez-Bon, Rafael

PY - 2018/10/1

Y1 - 2018/10/1

U2 - 10.1016/j.ceramint.2018.06.056

DO - 10.1016/j.ceramint.2018.06.056

M3 - Article

SP - 16428

EP - 16434

JO - Ceramics International

JF - Ceramics International

SN - 0272-8842

ER -