Stable temperature coefficient of resistance in TiSiON thin film resistors deposited by magnetron co-sputtering

Marcela Mireles, M. A. Quevedo Lopez

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Pages (from-to)1484-1490
Number of pages7
JournalCurrent Applied Physics
DOIs
StatePublished - 1 Nov 2016
Externally publishedYes

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