Structure and refractive index of thin alumina films grown by atomic layer deposition

M. Tulio Aguilar-Gama, Erik Ramírez-Morales, Z. Montiel-González, A. Mendoza-Galván, Mérida Sotelo-Lerma, P. K. Nair, Hailin Hu

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    Aguilar-Gama, M. T., Ramírez-Morales, E., Montiel-González, Z., Mendoza-Galván, A., Sotelo-Lerma, M., Nair, P. K., & Hu, H. (2015). Structure and refractive index of thin alumina films grown by atomic layer deposition. Journal of Materials Science: Materials in Electronics, 5546-5552. https://doi.org/10.1007/s10854-014-2111-z