Structure and refractive index of thin alumina films grown by atomic layer deposition

  • M. Tulio Aguilar-Gama
  • , Erik Ramírez-Morales
  • , Z. Montiel-González*
  • , A. Mendoza-Galván
  • , Mérida Sotelo-Lerma
  • , P. K. Nair
  • , Hailin Hu
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

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Engineering

Material Science