Synthesis and characterization of Si/Si2N2O/Si 3N4 composites from solid-gas precursor system via CVD

J.C. Flores-García, A.L. Leal-Cruz, M.I. Pech-Canul

Research output: Book/Report › Book › peer-review

Original language	Undefined/Unknown
State	Published - 2009

Cite this

TY - BOOK

T1 - Synthesis and characterization of Si/Si2N2O/Si 3N4 composites from solid-gas precursor system via CVD

AU - Flores-García, J.C.

AU - Leal-Cruz, A.L.

AU - Pech-Canul, M.I.

PY - 2009

Y1 - 2009

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-70349158074&partnerID=MN8TOARS

M3 - Libro

BT - Synthesis and characterization of Si/Si2N2O/Si 3N4 composites from solid-gas precursor system via CVD

ER -