Synthesis of (α- and β-)Si3N4/Si2N2O into silicon particulate porous preforms by hybrid system CVI and direct nitridation

  • J. C. Flores-García
  • , M. I. Pech-Canul*
  • , A. L. Leal-Cruz
  • , J. C. Rendón-Angeles
  • *Corresponding author for this work

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Material Science