Synthesis of Si3N4 from Na2SiF6 as a solid precursor: Thermodynamic study

A. L. Leal-Cruz*, M. I. Pech-Canul

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

CVD silicon nitride (Si3N4) is typically produced from gas or liquid precursors containing nitrogen and silicon. The method using Na2SiF6(s) as silicon solid precursor to produce films/coatings, reinforcements and powders of silicon nitride by CVD has been recently proposed in the literature. In this investigation, a thermodynamic study is carried out using the FactSage Thermochemical Software and Databases, in order to explain the phenomena associated to the synthesis of Si 3N4 with Na2SiF6 as solid precursor. Accordingly, CVD diagrams for Na2SiF6, SiF4, SiF3, SiF2, SiF, and Si both with N2 and NH3 are constructed using such a software. Thermodynamically Si 3N4 can be produced from SiF4(g) or Na 2SiF6(s) with ammonia. Although thermodynamic considerations show that Si3N4 cannot be produced with the use of nitrogen, experimental results in this investigation show that it is formed with both ammonia and nitrogen.

Original languageEnglish
Title of host publicationAdvanced Structural Materials III - Advanced Structural Materials Symposium of the Annual Congress of the Mexican Academy of Materials Science
PublisherTrans Tech Publications Ltd
Pages11-16
Number of pages6
ISBN (Print)0878494464, 9780878494460
DOIs
StatePublished - 2007
Externally publishedYes
EventAdvanced Structural Materials Symposium of the Annual Congress of the Mexican Academy of Materials Science - Cancun Quintana Roo, Mexico
Duration: 20 Aug 200624 Aug 2006

Publication series

NameMaterials Science Forum
Volume560
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

ConferenceAdvanced Structural Materials Symposium of the Annual Congress of the Mexican Academy of Materials Science
Country/TerritoryMexico
CityCancun Quintana Roo
Period20/08/0624/08/06

Keywords

  • CVD
  • Precursors
  • Silicon nitride
  • Thermodynamics

Fingerprint

Dive into the research topics of 'Synthesis of Si3N4 from Na2SiF6 as a solid precursor: Thermodynamic study'. Together they form a unique fingerprint.

Cite this