@conference{c73a70ef2aa24ad697896fd3e57aeb57,
title = "Systematic gate stack optimization to maximize mobility with HfSiON EOT scaling",
author = "Quevedo-Lopez, {M. A.} and Kirsch, {P. D.} and S. Krishnan and Alshareef, {H. N.} and J. Barnett and Harris, {H. R.} and A. Neugroschel and Aguirre-Tostado, {F. S.} and Gnade, {B. E.} and Kim, {M. J.} and Wallace, {R. M.} and Lee, {B. H.}",
year = "2006",
month = jan,
day = "1",
language = "American English",
pages = "113--116",
note = "ESSDERC 2006 - Proceedings of the 36th European Solid-State Device Research Conference ; Conference date: 01-01-2006",
}