Systematic gate stack optimization to maximize mobility with HfSiON EOT scaling

M. A. Quevedo-Lopez, P. D. Kirsch, S. Krishnan, H. N. Alshareef, J. Barnett, H. R. Harris, A. Neugroschel, F. S. Aguirre-Tostado, B. E. Gnade, M. J. Kim, R. M. Wallace, B. H. Lee

Research output: Contribution to conferencePaper

3 Scopus citations

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Physics & Astronomy