Technology and reliability challenges of SUB-nm EOT high-κ/ metal gate electrode transistors

Jeff J. Peterson; Paul Kirsch; Gennadi Beisukel; Siddarth Krishuan; Prashant Majhi; Pat Lysaght; Manuel Quevedo-Lopez; Hong Jyh Li; Yoshi Senzaki; Rusty Harris; Chadwin D. Young; Rino Choi; Johnny Sim; Joel Barnett; Naim Moumen; Craig Huffmau; Mark I. Gardner; George A. Brown; Peter M. Zeitzoff; Byoung Hun Lee; Chuck Ramiller; Howard R. Huff

Technology and reliability challenges of SUB-nm EOT high-κ/ metal gate electrode transistors

Jeff J. Peterson, Paul Kirsch, Gennadi Beisukel, Siddarth Krishuan, Prashant Majhi, Pat Lysaght, Manuel Quevedo-Lopez, Hong Jyh Li, Yoshi Senzaki, Rusty Harris, Chadwin D. Young, Rino Choi, Johnny Sim, Joel Barnett, Naim Moumen, Craig Huffmau, Mark I. Gardner, George A. Brown, Peter M. Zeitzoff, Byoung Hun LeeChuck Ramiller, Howard R. Huff

Research output: Contribution to conference › Paper

Original language	American English
Pages	105-118
Number of pages	14
State	Published - 1 Dec 2006
Externally published	Yes
Event	Proceedings - Electrochemical Society - Duration: 1 Dec 2006 → …

Conference

Conference	Proceedings - Electrochemical Society
Period	1/12/06 → …

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https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=52649145350&origin=inward

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Peterson, J. J., Kirsch, P., Beisukel, G., Krishuan, S., Majhi, P., Lysaght, P., Quevedo-Lopez, M., Li, H. J., Senzaki, Y., Harris, R., Young, C. D., Choi, R., Sim, J., Barnett, J., Moumen, N., Huffmau, C., Gardner, M. I., Brown, G. A., Zeitzoff, P. M., ... Huff, H. R. (2006). Technology and reliability challenges of SUB-nm EOT high-κ/ metal gate electrode transistors. 105-118. Paper presented at Proceedings - Electrochemical Society, . https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=52649145350&origin=inward

Peterson, Jeff J. ; Kirsch, Paul ; Beisukel, Gennadi ; Krishuan, Siddarth ; Majhi, Prashant ; Lysaght, Pat ; Quevedo-Lopez, Manuel ; Li, Hong Jyh ; Senzaki, Yoshi ; Harris, Rusty ; Young, Chadwin D. ; Choi, Rino ; Sim, Johnny ; Barnett, Joel ; Moumen, Naim ; Huffmau, Craig ; Gardner, Mark I. ; Brown, George A. ; Zeitzoff, Peter M. ; Lee, Byoung Hun ; Ramiller, Chuck ; Huff, Howard R. / Technology and reliability challenges of SUB-nm EOT high-κ/ metal gate electrode transistors. Paper presented at Proceedings - Electrochemical Society, .14 p.

@conference{5a1f43adae2f4b9e8846dac3dd3b3238,

title = "Technology and reliability challenges of SUB-nm EOT high-κ/ metal gate electrode transistors",

author = "Peterson, {Jeff J.} and Paul Kirsch and Gennadi Beisukel and Siddarth Krishuan and Prashant Majhi and Pat Lysaght and Manuel Quevedo-Lopez and Li, {Hong Jyh} and Yoshi Senzaki and Rusty Harris and Young, {Chadwin D.} and Rino Choi and Johnny Sim and Joel Barnett and Naim Moumen and Craig Huffmau and Gardner, {Mark I.} and Brown, {George A.} and Zeitzoff, {Peter M.} and Lee, {Byoung Hun} and Chuck Ramiller and Huff, {Howard R.}",

year = "2006",

month = dec,

day = "1",

language = "American English",

pages = "105--118",

note = "Proceedings - Electrochemical Society ; Conference date: 01-12-2006",

}

Peterson, JJ, Kirsch, P, Beisukel, G, Krishuan, S, Majhi, P, Lysaght, P, Quevedo-Lopez, M, Li, HJ, Senzaki, Y, Harris, R, Young, CD, Choi, R, Sim, J, Barnett, J, Moumen, N, Huffmau, C, Gardner, MI, Brown, GA, Zeitzoff, PM, Lee, BH, Ramiller, C & Huff, HR 2006, 'Technology and reliability challenges of SUB-nm EOT high-κ/ metal gate electrode transistors', Paper presented at Proceedings - Electrochemical Society, 1/12/06 pp. 105-118. <https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=52649145350&origin=inward>

Technology and reliability challenges of SUB-nm EOT high-κ/ metal gate electrode transistors. / Peterson, Jeff J.; Kirsch, Paul; Beisukel, Gennadi; Krishuan, Siddarth; Majhi, Prashant; Lysaght, Pat; Quevedo-Lopez, Manuel; Li, Hong Jyh; Senzaki, Yoshi; Harris, Rusty; Young, Chadwin D.; Choi, Rino; Sim, Johnny; Barnett, Joel; Moumen, Naim; Huffmau, Craig; Gardner, Mark I.; Brown, George A.; Zeitzoff, Peter M.; Lee, Byoung Hun; Ramiller, Chuck; Huff, Howard R.

2006. 105-118 Paper presented at Proceedings - Electrochemical Society, .

Research output: Contribution to conference › Paper

TY - CONF

T1 - Technology and reliability challenges of SUB-nm EOT high-κ/ metal gate electrode transistors

AU - Peterson, Jeff J.

AU - Kirsch, Paul

AU - Beisukel, Gennadi

AU - Krishuan, Siddarth

AU - Majhi, Prashant

AU - Lysaght, Pat

AU - Quevedo-Lopez, Manuel

AU - Li, Hong Jyh

AU - Senzaki, Yoshi

AU - Harris, Rusty

AU - Young, Chadwin D.

AU - Choi, Rino

AU - Sim, Johnny

AU - Barnett, Joel

AU - Moumen, Naim

AU - Huffmau, Craig

AU - Gardner, Mark I.

AU - Brown, George A.

AU - Zeitzoff, Peter M.

AU - Lee, Byoung Hun

AU - Ramiller, Chuck

AU - Huff, Howard R.

PY - 2006/12/1

Y1 - 2006/12/1

M3 - Paper

SP - 105

EP - 118

T2 - Proceedings - Electrochemical Society

Y2 - 1 December 2006

ER -