The effect of small-signal AC voltages on C - V characterization and parameter extraction of SiO<inf>2</inf>thin films

Hongguo Zhang, Pant Gurang, Nihdi Sigh, Quvdo Manuel, Robert Wallace, Bruce Gnade, Kevin Stokes

Research output: Contribution to journalArticle

1 Scopus citations
Original languageAmerican English
Pages (from-to)1981-1985
Number of pages5
JournalMicroelectronics Reliability
DOIs
StatePublished - 1 Dec 2003
Externally publishedYes

Fingerprint Dive into the research topics of 'The effect of small-signal AC voltages on C - V characterization and parameter extraction of SiO<inf>2</inf>thin films'. Together they form a unique fingerprint.

  • Cite this