Original language | American English |
---|---|
Pages (from-to) | 1437-1440 |
Number of pages | 4 |
Journal | Semiconductor Science and Technology |
DOIs | |
State | Published - 10 Oct 2006 |
Externally published | Yes |
Thermal annealing effects on a representative high-k/metal film stack
M. M. Hussain, M. A. Quevedo-Lopez, H. N. Alshareef, H. C. Wen, D. Larison, B. Gnade, M. El-Bouanani
Research output: Contribution to journal › Article › peer-review
20
Scopus
citations