Thermal annealing effects on a representative high-k/metal film stack

M. M. Hussain, M. A. Quevedo-Lopez, H. N. Alshareef, H. C. Wen, D. Larison, B. Gnade, M. El-Bouanani

Research output: Contribution to journalArticle

20 Scopus citations
Original languageAmerican English
Pages (from-to)1437-1440
Number of pages4
JournalSemiconductor Science and Technology
DOIs
StatePublished - 10 Oct 2006
Externally publishedYes

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