Thermal annealing effects on a representative high-k/metal film stack

M. M. Hussain, M. A. Quevedo-Lopez, H. N. Alshareef, H. C. Wen, D. Larison, B. Gnade, M. El-Bouanani

Research output: Contribution to journal › Article › peer-review

Original language	American English
Pages (from-to)	1437-1440
Number of pages	4
Journal	Semiconductor Science and Technology
DOIs	https://doi.org/10.1088/0268-1242/21/10/012
State	Published - 10 Oct 2006
Externally published	Yes

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title = "Thermal annealing effects on a representative high-k/metal film stack",

author = "Hussain, {M. M.} and Quevedo-Lopez, {M. A.} and Alshareef, {H. N.} and Wen, {H. C.} and D. Larison and B. Gnade and M. El-Bouanani",

year = "2006",

month = oct,

day = "10",

doi = "10.1088/0268-1242/21/10/012",

language = "American English",

pages = "1437--1440",

journal = "Semiconductor Science and Technology",

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T1 - Thermal annealing effects on a representative high-k/metal film stack

AU - Hussain, M. M.

AU - Quevedo-Lopez, M. A.

AU - Alshareef, H. N.

AU - Wen, H. C.

AU - Larison, D.

AU - Gnade, B.

AU - El-Bouanani, M.

PY - 2006/10/10

Y1 - 2006/10/10

U2 - 10.1088/0268-1242/21/10/012

DO - 10.1088/0268-1242/21/10/012

M3 - Article

SP - 1437

EP - 1440

JO - Semiconductor Science and Technology

JF - Semiconductor Science and Technology

SN - 0268-1242

ER -