Thermal stability of lanthanum in hafnium-based gate stacks

M. I. Medina-Montes, M. V. Selvidge, A. Herrera-Gomez, F. S. Aguirre-Tostado, M. A. Quevedo-Lopez, R. M. Wallace

Research output: Contribution to journalArticle

11 Scopus citations
Original languageAmerican English
JournalJournal of Applied Physics
DOIs
StatePublished - 28 Sep 2009
Externally publishedYes

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