Thermally induced Zr incorporation into Si from zirconium silicate thin films

M. Quevedo-Lopez, M. El-Bouanani, S. Addepalli, J. L. Duggan, B. E. Gnade, R. M. Wallace, M. R. Visokay, M. Douglas, M. J. Bevan, L. Colombo

Research output: Contribution to journalArticlepeer-review

39 Scopus citations
Original languageAmerican English
Pages (from-to)2958-2960
Number of pages3
JournalApplied Physics Letters
DOIs
StatePublished - 29 Oct 2001
Externally publishedYes

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