Thermally induced Zr incorporation into Si from zirconium silicate thin films

M. Quevedo-Lopez, M. El-Bouanani, S. Addepalli, J. L. Duggan, B. E. Gnade, R. M. Wallace, M. R. Visokay, M. Douglas, M. J. Bevan, L. Colombo

Research output: Contribution to journalArticle

39 Scopus citations
Original languageAmerican English
Pages (from-to)2958-2960
Number of pages3
JournalApplied Physics Letters
DOIs
StatePublished - 29 Oct 2001
Externally publishedYes

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    Quevedo-Lopez, M., El-Bouanani, M., Addepalli, S., Duggan, J. L., Gnade, B. E., Wallace, R. M., Visokay, M. R., Douglas, M., Bevan, M. J., & Colombo, L. (2001). Thermally induced Zr incorporation into Si from zirconium silicate thin films. Applied Physics Letters, 2958-2960. https://doi.org/10.1063/1.1415418