Understanding the effects of low-temperature passivation and annealing on ZnO TFTs test structures

Rodolfo A. Rodriguez-Davila, Pavel Bolshakov, Chadwin D. Young, Manuel Quevedo-Lopez

Research output: Contribution to conference › Paper

Original language	American English
Pages	190-193
Number of pages	4
DOIs	https://doi.org/10.1109/ICMTS.2019.8730965
State	Published - 1 Mar 2019
Externally published	Yes
Event	IEEE International Conference on Microelectronic Test Structures - Duration: 1 Mar 2019 → …

Conference	IEEE International Conference on Microelectronic Test Structures
Period	1/03/19 → …

Access to Document

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