Understanding the effects of low-temperature passivation and annealing on ZnO TFTs test structures

Rodolfo A. Rodriguez-Davila, Pavel Bolshakov, Chadwin D. Young, Manuel Quevedo-Lopez

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages190-193
Number of pages4
DOIs
StatePublished - 1 Mar 2019
Externally publishedYes
EventIEEE International Conference on Microelectronic Test Structures -
Duration: 1 Mar 2019 → …

Conference

ConferenceIEEE International Conference on Microelectronic Test Structures
Period1/03/19 → …

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    Rodriguez-Davila, R. A., Bolshakov, P., Young, C. D., & Quevedo-Lopez, M. (2019). Understanding the effects of low-temperature passivation and annealing on ZnO TFTs test structures. 190-193. Paper presented at IEEE International Conference on Microelectronic Test Structures, . https://doi.org/10.1109/ICMTS.2019.8730965