Wet chemical etching studies of Zr and Hf-silicate gate dielectrics

M. A. Quevedo-Lopez, M. El-Bouanani, R. M. Wallace, B. E. Gnade

Research output: Contribution to journalArticle

32 Scopus citations
Original languageAmerican English
Pages (from-to)1891-1897
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
DOIs
StatePublished - 1 Nov 2002
Externally publishedYes

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