Original language | American English |
---|---|
Pages (from-to) | 1891-1897 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
DOIs | |
State | Published - 1 Nov 2002 |
Externally published | Yes |
Wet chemical etching studies of Zr and Hf-silicate gate dielectrics
M. A. Quevedo-Lopez, M. El-Bouanani, R. M. Wallace, B. E. Gnade
Research output: Contribution to journal › Article › peer-review
32
Scopus
citations