TY - GEN
T1 - A gate dielectric last approach to integrate organic based devices on plastic substrates
AU - Gowrisanker, Srinivas
AU - Ai, Yuming
AU - Quevedo-Lopez, M. A.
AU - Jia, Huiping
AU - Vogel, Eric
AU - Gnade, Bruce
PY - 2008
Y1 - 2008
N2 - In this work we demonstrate a photo-lithographic based process to integrate organic-based devices including rectifiers, ring oscillators, current minors, inverters, diodes and capacitors on flexible substrates for RFID and flexible display applications. Our integration method includes a seven mask photolithography process that incorporates several discrete devices built with pentacene as the semiconductor and parylene as the gate dielectric and inter-level dielectric (ILD). The maximum temperature for all processes is 120°C.
AB - In this work we demonstrate a photo-lithographic based process to integrate organic-based devices including rectifiers, ring oscillators, current minors, inverters, diodes and capacitors on flexible substrates for RFID and flexible display applications. Our integration method includes a seven mask photolithography process that incorporates several discrete devices built with pentacene as the semiconductor and parylene as the gate dielectric and inter-level dielectric (ILD). The maximum temperature for all processes is 120°C.
UR - http://www.scopus.com/inward/record.url?scp=49849084367&partnerID=8YFLogxK
U2 - 10.1109/FEDC.2008.4483882
DO - 10.1109/FEDC.2008.4483882
M3 - Contribución a la conferencia
AN - SCOPUS:49849084367
SN - 9781424420544
T3 - Proceedings of the Academic Track of the 2008 Flexible Electronics and Displays - Conference and Exhibition, FLEX
BT - Proceedings of the Academic Track of the 2008 Flexible Electronics and Displays - Conference and Exhibition, FLEX
T2 - Academic Track of the 2008 Flexible Electronics and Displays - Conference and Exhibition, FLEX
Y2 - 21 January 2008 through 24 January 2008
ER -