@conference{5b3055905fdc4008be3f3c68b154ef6d,
title = "A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy",
author = "Marta Torralba and Yag{\"u}e-Fabra, {Jos{\'e} A.} and Albajez, {Jos{\'e} A.} and Margarita Valenzuela and Raquel Acero and Aguilar, {Juan J.}",
year = "2013",
month = jan,
day = "1",
language = "American English",
pages = "110--113",
note = "11th IMEKO TC14 International Symposium on Measurement and Quality Control, ISMQC 2013 ; Conference date: 01-01-2013",
}