A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy

Marta Torralba; José A. Yagüe-Fabra; José A. Albajez; Margarita Valenzuela; Raquel Acero; Juan J. Aguilar

A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy

Marta Torralba, José A. Yagüe-Fabra, José A. Albajez, Margarita Valenzuela, Raquel Acero, Juan J. Aguilar

Resultado de la investigación: Contribución a una conferencia › Artículo

Idioma original	Inglés estadounidense
Páginas	110-113
Número de páginas	4
Estado	Publicada - 1 ene 2013
Publicado de forma externa	Sí
Evento	11th IMEKO TC14 International Symposium on Measurement and Quality Control, ISMQC 2013 - Duración: 1 ene 2013 → …

Conferencia

Conferencia	11th IMEKO TC14 International Symposium on Measurement and Quality Control, ISMQC 2013
Período	1/01/13 → …

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https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84907355122&origin=inward

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Torralba, M., Yagüe-Fabra, J. A., Albajez, J. A., Valenzuela, M., Acero, R., & Aguilar, J. J. (2013). A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy. 110-113. Papel presentado en 11th IMEKO TC14 International Symposium on Measurement and Quality Control, ISMQC 2013, . https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84907355122&origin=inward

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title = "A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy",

author = "Marta Torralba and Yag{\"u}e-Fabra, {Jos{\'e} A.} and Albajez, {Jos{\'e} A.} and Margarita Valenzuela and Raquel Acero and Aguilar, {Juan J.}",

year = "2013",

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Torralba, M, Yagüe-Fabra, JA, Albajez, JA, Valenzuela, M, Acero, R & Aguilar, JJ 2013, 'A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy', Papel presentado en 11th IMEKO TC14 International Symposium on Measurement and Quality Control, ISMQC 2013, 1/01/13 pp. 110-113. <https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84907355122&origin=inward>

A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy. / Torralba, Marta; Yagüe-Fabra, José A.; Albajez, José A.; Valenzuela, Margarita; Acero, Raquel; Aguilar, Juan J.

2013. 110-113 Papel presentado en 11th IMEKO TC14 International Symposium on Measurement and Quality Control, ISMQC 2013, .

Resultado de la investigación: Contribución a una conferencia › Artículo

TY - CONF

T1 - A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy

AU - Torralba, Marta

AU - Yagüe-Fabra, José A.

AU - Albajez, José A.

AU - Valenzuela, Margarita

AU - Acero, Raquel

AU - Aguilar, Juan J.

PY - 2013/1/1

Y1 - 2013/1/1

M3 - Paper

SP - 110

EP - 113

T2 - 11th IMEKO TC14 International Symposium on Measurement and Quality Control, ISMQC 2013

Y2 - 1 January 2013

ER -