@conference{8611944696c647a89a80e60ac254bb3a,
title = "A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy",
author = "Marta Torralba and Yag{\"u}e-Fabra, {Jos{\'e} A.} and Albajez, {Jos{\'e} A.} and Margarita Valenzuela and Raquel Acero and Aguilar, {Juan J.}",
year = "2014",
month = jan,
day = "1",
language = "American English",
pages = "132--135",
note = "11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, LMPMI 2014 ; Conference date: 01-01-2014",
}