| Idioma original | Inglés estadounidense |
|---|---|
| Páginas | 132-135 |
| Número de páginas | 4 |
| Estado | Publicada - 1 ene 2014 |
| Publicado de forma externa | Sí |
| Evento | 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, LMPMI 2014 - Duración: 1 ene 2014 → … |
Conferencia
| Conferencia | 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, LMPMI 2014 |
|---|---|
| Período | 1/01/14 → … |
Huella dactilar
Precision engineering
Surface topography
Nanotechnology
Atomic force microscopy
Finite element method
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Torralba, M., Yagüe-Fabra, J. A., Albajez, J. A., Valenzuela, M., Acero, R., & Aguilar, J. J. (2014). A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy. 132-135. Papel presentado en 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, LMPMI 2014, .
@conference{8611944696c647a89a80e60ac254bb3a,
title = "A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy",
author = "Marta Torralba and Yag{\"u}e-Fabra, {Jos{\'e} A.} and Albajez, {Jos{\'e} A.} and Margarita Valenzuela and Raquel Acero and Aguilar, {Juan J.}",
year = "2014",
month = "1",
day = "1",
language = "American English",
pages = "132--135",
note = "11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, LMPMI 2014 ; Conference date: 01-01-2014",
}
Torralba, M, Yagüe-Fabra, JA, Albajez, JA, Valenzuela, M, Acero, R & Aguilar, JJ 2014, 'A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy' Papel presentado en, 1/01/14, pp. 132-135.
A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy. / Torralba, Marta; Yagüe-Fabra, José A.; Albajez, José A.; Valenzuela, Margarita; Acero, Raquel; Aguilar, Juan J.
2014. 132-135 Papel presentado en 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, LMPMI 2014, .Resultado de la investigación: Contribución a una conferencia › Artículo › Investigación
TY - CONF
T1 - A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy
AU - Torralba, Marta
AU - Yagüe-Fabra, José A.
AU - Albajez, José A.
AU - Valenzuela, Margarita
AU - Acero, Raquel
AU - Aguilar, Juan J.
PY - 2014/1/1
Y1 - 2014/1/1
M3 - Paper
SP - 132
EP - 135
ER -
Torralba M, Yagüe-Fabra JA, Albajez JA, Valenzuela M, Acero R, Aguilar JJ. A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy. 2014. Papel presentado en 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, LMPMI 2014, .