Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method

Raúl García-Llamas*, J. Félix Aguilar

*Autor correspondiente de este trabajo

Producción científica: Contribución a una revistaArtículo de la conferenciarevisión exhaustiva

Resumen

We obtain the reflection spectra of p?polarized light from metallic gratings fabricated by means of the interference technique. The gratings have constant period and heights are varied by changing the exposure time of the interference pattern on the sample. The experimental spectra show two minima due to the excitation of surface plasmons. and they are compared with the corresponding numerical results obtained with two models, the Rayleigh theory and the rigorous integral method. In order to demonstrate the validity of the Rayleigh hypothesis the amplitudes of the gratings are chosen close to the Rayleigh limit.

Idioma originalInglés
Páginas (desde-hasta)153-160
Número de páginas8
PublicaciónProceedings of SPIE - The International Society for Optical Engineering
Volumen4780
DOI
EstadoPublicada - 2002
EventoSurface Scattering and Diffraction for Advanced Metrology II - Seattle, WA, Estados Unidos
Duración: 9 jul. 2002 → …

Huella

Profundice en los temas de investigación de 'Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method'. En conjunto forman una huella única.

Citar esto