Characterization of a capacitive sensor used in an indexed rotary metrology platform

A. Brau, J. Santolaria, R. M. Gella, J. A. Albajez, J. J. Aguilar

Resultado de la investigación: Contribución a una conferenciaArtículo

Resumen

Nowadays, there has been an increasing use of non-contact sensors for measuring small displacements in the range of sub-micrometre and nanometre resolution in applications to fields such as nanopositioning, scanning, metrology, etc. Within this group of sensors, capacitive sensors are becoming more and more used due to their high accuracy and to the insensitivity to changes in magnetic field [1]. In the field of dimensional metrology applications, 3 capacitive sensors were used in the Triskelion ultra-precision probe to determine the X, Y and Z deflections of the probe tip of the ISARA 400 [2]. Nevertheless, as far as we know there aren't any references on the use of capacitive sensors in applications with portable coordinate measuring instruments, in particular, coordinate measuring arms or laser trackers. In this work, we present the characterization of a capacitive sensor and the use of six capacitive sensors to increase the final positioning repeatability of an indexed rotary metrology platform [3]. The purpose of this platform is to increase the final accuracy and simplification of the calibration, identification and the verification of geometrical parameters procedures of portable coordinate measuring machines (PCMM).
Idioma originalInglés estadounidense
Páginas162-165
Número de páginas4
EstadoPublicada - 1 ene. 2011
Publicado de forma externa
EventoProceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011 -
Duración: 1 ene. 2011 → …

Conferencia

ConferenciaProceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
Período1/01/11 → …

Huella

Profundice en los temas de investigación de 'Characterization of a capacitive sensor used in an indexed rotary metrology platform'. En conjunto forman una huella única.

Citar esto