Deep UV Sensors Enabling Solar-Blind Flame Detectors for Large-Area Applications

Carlos Avila-Avendano, Maria I. Pintor-Monroy, Adelmo Ortiz-Conde, Jesus A. Caraveo-Frescas*, Manuel A. Quevedo-Lopez

*Autor correspondiente de este trabajo

Producción científica: Contribución a una revistaArtículorevisión exhaustiva

17 Citas (Scopus)

Resumen

Large-Area compatible, solar-blind deep-ultraviolet sensors based on active pixels are demonstrated with CMOS amplifiers based on poly-Si thin-film transistors and Ga2 O3 thin-film photoresistors. The active pixel configuration sensor enables approximately 40X higher responsivity compared to a discrete sensor, and the CMOS inverter amplifier exhibits a gain of 210 V/V. The Ga2 O3-based sensors were integrated on the same substrate depositing the films using magnetron sputtering at room temperature, ensuring its compatibility with large-Area applications. The responsivity of discrete Ga2 O3 sensors was evaluated at different wavelengths in the deep-ultraviolet and visible ranges, and showed a maximum responsivity of 51 A/W for a wavelength of 232 nm, with a deep-ultraviolet to visible light rejection ratio of approximately 102. The active pixel sensor was implemented as flame detector resulting in an output voltage signal of up to 2 V when the system was exposed to a flame under regular background illumination conditions.

Idioma originalInglés
Número de artículo9398940
Páginas (desde-hasta)14815-14821
Número de páginas7
PublicaciónIEEE Sensors Journal
Volumen21
N.º13
DOI
EstadoPublicada - 1 jul. 2021

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