TY - GEN
T1 - Design of spectrometers and ended-ended systems
AU - Rojas-Hernandez, A. G.
AU - Vera-Marquina, A.
AU - Berman Mendoza, Dainet
AU - Garcia-Juarez, A.
PY - 2010
Y1 - 2010
N2 - Optical microspectrometers have huge potential for application in industry, science, medicine, agriculture and biology. The actuallity is towards fully integrated optical microsystems. Complete silicon IC compatible MEMS-based optoelectrical microsystems on a single chip. This systems however, impose limitations. The required process compatibility and limited choice of acceptable materials does not necessarily give high optimal optical performance. This work study the best characteristics of micromirrors fabricated with anisotropic etching and used in spectrophotometers and endedended systems. The trends, the potential, the limitations and approaches to obtain a sufficient optical performance, in terms of spectral resolution and throughput, for serving the majority of applications.
AB - Optical microspectrometers have huge potential for application in industry, science, medicine, agriculture and biology. The actuallity is towards fully integrated optical microsystems. Complete silicon IC compatible MEMS-based optoelectrical microsystems on a single chip. This systems however, impose limitations. The required process compatibility and limited choice of acceptable materials does not necessarily give high optimal optical performance. This work study the best characteristics of micromirrors fabricated with anisotropic etching and used in spectrophotometers and endedended systems. The trends, the potential, the limitations and approaches to obtain a sufficient optical performance, in terms of spectral resolution and throughput, for serving the majority of applications.
KW - MEMs
KW - Microspectrometers
KW - Optoelectronic integrated circuit
KW - Silicon bulk
UR - https://www.scopus.com/pages/publications/77951552414
U2 - 10.1117/12.847793
DO - 10.1117/12.847793
M3 - Contribución a la conferencia
AN - SCOPUS:77951552414
SN - 9780819479907
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems IX
T2 - MOEMS and Miniaturized Systems IX
Y2 - 25 January 2010 through 27 January 2010
ER -