Homing sensor system design for a 2D long range nanopositioning moving platform

R. Acero, J. A. Albajez, J. A. Yagüe-Fabra, M. Torralba, M. Valenzuela, J. J. Aguilar

Resultado de la investigación: Capítulo del libro/informe/acta de congresoContribución a la conferencia

Resumen

The nanotechnology field has been developing strongly in recent years and ultra-precision measuring systems are nowadays required. A new two-dimensional moving platform with 50x50 mm range of travel, nanometer resolution and sub micrometer accuracy is being designed by the authors in order to be integrated with an Atomic Force Microscope (AFM). In this work the definition, design and experimental characterization of a homing sensor system for this 2D moving platform is presented. The homing sensor system will allow the generation of an absolute 2D reference for the platform (X-Y axis and θz rotation), defining an initial cero for the measuring system, which is based on laser encoders. © (2014) Trans Tech Publications, Switzerland.
Idioma originalInglés estadounidense
Título de la publicación alojadaHoming sensor system design for a 2D long range nanopositioning moving platform
Páginas57-62
Número de páginas6
ISBN (versión digital)9783038351269
DOI
EstadoPublicada - 1 ene 2014
EventoKey Engineering Materials -
Duración: 1 ene 2014 → …

Serie de la publicación

NombreKey Engineering Materials
Volumen615
ISSN (versión impresa)1013-9826

Conferencia

ConferenciaKey Engineering Materials
Período1/01/14 → …

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