Homing sensor system design for a 2D long range nanopositioning moving platform

R. Acero*, J. A. Albajez, J. A. Yagüe-Fabra, M. Torralba, M. Valenzuela, J. J. Aguilar

*Autor correspondiente de este trabajo

Producción científica: Capítulo del libro/informe/acta de congresoContribución a la conferenciarevisión exhaustiva

Resumen

The nanotechnology field has been developing strongly in recent years and ultra-precision measuring systems are nowadays required. A new two-dimensional moving platform with 50x50 mm range of travel, nanometer resolution and sub micrometer accuracy is being designed by the authors in order to be integrated with an Atomic Force Microscope (AFM). In this work the definition, design and experimental characterization of a homing sensor system for this 2D moving platform is presented. The homing sensor system will allow the generation of an absolute 2D reference for the platform (X-Y axis and θz rotation), defining an initial cero for the measuring system, which is based on laser encoders.

Idioma originalInglés
Título de la publicación alojadaAdvances in Manufacturing Systems, MESIC 2013
EditorialTrans Tech Publications Ltd
Páginas57-62
Número de páginas6
ISBN (versión impresa)9783038351269
DOI
EstadoPublicada - 2014
Evento5th International Conference of Manufacturing Engineering Society, MESIC 2013 - Zaragoza, Espana
Duración: 26 jun. 201328 jun. 2013

Serie de la publicación

NombreKey Engineering Materials
Volumen615
ISSN (versión impresa)1013-9826
ISSN (versión digital)1662-9795

Conferencia

Conferencia5th International Conference of Manufacturing Engineering Society, MESIC 2013
País/TerritorioEspana
CiudadZaragoza
Período26/06/1328/06/13

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