Micro-structures of nanodiamonds grown on silicon by hot filament chemical vapor deposition

J. A. Montes-Gutierrez, R. Garcia-Gutierrez, M. Barboza-Flores, R. Meléndrez, R. E. Cabanillas, O. E. Contreras, G. A. Hirata, R. Rangel-Segura

Resultado de la investigación: Contribución a una revistaArtículorevisión exhaustiva

2 Citas (Scopus)


© 2017 Walter de Gruyter GmbH, Berlin/Boston. A method to grow homogeneous micro-sized diamond clusters on silicon by Hot-Filament Chemical Vapor Deposition in a homemade reactor is reported in this work. Thermal decomposition of a CH4:H2mixture gases was carried out in a horizontal quartz-tube reactor at 2200 °C filament temperature and 1000 °C substrate temperature at relative low pressure around 150 Torr depositing diamonds on silicon wafers. The diamond micro-structures are formed by nano-crystalline diamonds, they have a rounded shape and a narrow particle size distribution around a micrometer. The diamond micro-structures synthesized in this work showed a strong Raman shift signal, a peak at 1330 cm-1typical of the diamond and a single optical trap was localized nearby 300oC by Thermoluminescence analysis indicating that these diamond micro-structures could be a good thermoluminescent dosimeter material. Due to their excellent properties, diamonds obtained by this technique should find application in the biomedical and optoelectronic industry.
Idioma originalInglés estadounidense
PublicaciónInternational Journal of Chemical Reactor Engineering
EstadoPublicada - 20 dic 2017


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