Silicon quadrant detector in CMOS technology

A. Vera Marquina*, A. Torres Jácome

*Autor correspondiente de este trabajo

Producción científica: Contribución a una revistaArtículo de la conferenciarevisión exhaustiva

1 Cita (Scopus)

Resumen

An optoelectronic device that detect visible light is designed in silicon technology, peaking in 650 nm wavelength. The quadrant detector (QD) derive photocurrents by projecting a light spot on four photodiodes placed close to each other on a silicon common substrate. The photodetector is square shaped with 2.25 mm per active area by each quadrant and the size of the device is 9mm2. This work describes a technology to develop position sensitive detectors of four quadrant optimizing geometry to increase sensitivity. We propose to integrate sensor into complementary metal-oxide-semiconductor (CMOS) technology in order to improve photodetector out signal, reducing noise generated when photodetector is so far from data acquisition system.

Idioma originalInglés
Número de artículo175
Páginas (desde-hasta)922-925
Número de páginas4
PublicaciónProceedings of SPIE - The International Society for Optical Engineering
Volumen5622
N.ºPART 2
DOI
EstadoPublicada - 2004
EventoRIAO/OPTILAS 2004: 5th Iberoamerican Meeting on Optics, and 8th Latin American Meeting on Optics, Lasers, and their Applications; ICO Regional Meeting - Porlamar, República Bolivariana de Venezuela
Duración: 3 oct. 20048 oct. 2004

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