Study on the microstructure and electrical properties of Pb(Zr 0.53 Ti0.47)O3 thin-films

L. A. Baldenegro-Perez, W. Debray-Mechtaly, E. Fuentes-Fernandez, M. A. Quevedo-Lopez, H. N. Alshareefe, Pradeep Shah, B. A. Gnade

Producción científica: Capítulo del libro/informe/acta de congresoContribución a la conferenciarevisión exhaustiva

2 Citas (Scopus)

Resumen

Abstract. In the present study a complete analysis of the morphological and electrical properties of PZT layers with composition 53Zr-47Ti is presented. Three different samples composed of 3, 6, and 9 PZT layers were analyzed on a substrate consisting of ZrO2-SiO2-Si structures. The PZT and ZrO2 layers were deposited via Sol-Gel, whereas the SiO2 layer, on every sample, was deposited via PECVD. SEM results showed morphology of very small granules on the 3 layered thin-film samples (12 nm), on the 6 layered thin-film samples a mixture of small and large size (100-300 nm) granule formation was observed, with the 9 layered thin-film samples exhibiting very large granule sizes (bigger than 300 nm). XRD results showed that increasing the number of deposited layers caused an incremental increase on the detected peak intensities, aided in the promotion of the perovskite phase, and diminished the presence of the pyrochlore phase. It was also observed, during electrical measurements, that increasing the number deposited layers directly increased the overall capacitance of the thin-film structure. This effect was attributed primarily to the large amount of perovskite and large size of grains presented on thick samples.

Idioma originalInglés
Título de la publicación alojadaAdvanced Electron Microscopy and Nanomaterials
EditorialTrans Tech Publications Ltd
Páginas97-100
Número de páginas4
ISBN (versión impresa)087849281X, 9780878492817
DOI
EstadoPublicada - 2010
Publicado de forma externa
Evento1st Joint Advanced Electron Microscopy School for Nanomaterials and the Workshop on Nanomaterials, AEM-NANOMAT'09 - Saltillo, Coahuila, México
Duración: 29 sep. 20092 oct. 2009

Serie de la publicación

NombreMaterials Science Forum
Volumen644
ISSN (versión impresa)0255-5476
ISSN (versión digital)1662-9752

Conferencia

Conferencia1st Joint Advanced Electron Microscopy School for Nanomaterials and the Workshop on Nanomaterials, AEM-NANOMAT'09
País/TerritorioMéxico
CiudadSaltillo, Coahuila
Período29/09/092/10/09

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